Integrated circuit (IC) equipment is essential in the industrial chain of IC, the industry of which features high technical thresholds. This paper analyzes its industry development status both at home and abroad, the development trends of its core process equipment technologies, and the challenges faced by technologies of its key matching parts. On this basis, the problems and pain points of China’s IC equipment industry are explored to predict the development trends of the industry and its technologies. Finally, measures and suggestions are proposed for the development of China’s IC equipment industry under this background.