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Science and Technology Foresight
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Current Situation and Development Trend of Core Process Equipment Technologies for Integrated Circuit
ZHAO Jinrong, WEI Gang, HOU Jue, CAO Yongyou, DONG Jinwei, LU Xisheng, SUN Wei
Science and Technology Foresight . 2022, (
3
): 61 -72 . DOI: 10.3981/j.issn.2097-0781.2022.03.005
