Evolution of Advanced CMOS Technology and Suggestions for Its Development in China
ZHANG Wei, XU Min, CHEN Kun, LIU Tao, YANG Jingwen, SUN Xin, HUANG Ziqiang, WANG Dawei, WU Chunlei, WANG Chen, XU Saisheng
Science and Technology Foresight
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2022, (3): 52
-60
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DOI: 10.3981/j.issn.2097-0781.2022.03.004
