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Development Trend and Prospect of Traffic System Simulation Technology
SUN Jian, TIAN Ye, REN Gang
Abstract731)   HTML46)    PDF (1853KB)(1233)      

Traffic simulation is a crucial tool to assess, analyze, and optimize the complex traffic system. Traffic simulation system serves as the fundamental industrial software in the realm of the traffic and transportation industry. Traffic system simulation technology is the key stranglehold problem in China’s traffic and transportation industry. Based on the in-depth analysis of traffic system simulation technology in China and abroad and the overall goal of building a country with a strong transportation network, this paper systematically combs the development status, issues and challenges of traffic system simulation technology and looks forward to the development trend of traffic systems simulation technology in China. It also summarizes four key development directions: multi-resolution simulation, deep simulation, digital twin, and simulation as a service. Finally, the development strategy is proposed to build an autonomous, controllable, safe, credible, efficient, and available traffic simulation system.

2023, 2 (3): 77-85.   doi: 10.3981/j.issn.2097-0781.2023.03.007
Progress and Challenges of Lithographic Materials for Multi-patterning Process
LI Bing, SUN Jia, CHEN Cindy Xin
Abstract540)   HTML26)    PDF (2747KB)(1875)      

Integrated circuit (IC) chips play a more and more important role in everyday life and the national economy, and the capability of manufacturing chips is a key indicator of a nation’s technology status. Due to the Wassenaar Arrangement, China cannot import the extreme ultraviolet (EUV) lithography technique, and thus ArF immersion lithography with the multi-patterning process is essential to the development of ICs, which poses higher requirements for lithographic materials used in the multi-patterning process. In this paper, we summarize the paths of the multi-patterning process and lithographic materials involved upon the review of the development of lithography technology. Moreover, we analyze the technical development of and challenges faced by advanced lithographic materials such as ArF immersion photoresists, pattern shrink materials, and trilayer materials (spin-on glass and spin-on carbon). The review and outlook of the technical evolution indicate that the passive equipment-driven development mode of lithographic materials has transformed into the coordinated development mode of material innovation and equipment processes. In particular, with limited equipment, China should take the innovation of materials as the driver to develop an IC path with Chinese characteristics.

2022, 1 (3): 73-83.   doi: 10.3981/j.issn.2097-0781.2022.03.006