Technology Status and Application Outlook of Micro-Opto-Electro-Mechanical System Accelerometers

doi:10.3981/j.issn.2097-0781.2022.04.006

Abstract

Abstract:

A micro-opto-electro-mechanical system (MOEMS) accelerometer features high precision, electromagnetic interference resistance, good adaptability to the environment, high reliability, and easy miniaturization, which is the major development trend of inertial instruments. According to the optical measurement principle, this paper divides MOEMS accelerometers into three categories, which are based on the direct intensity modulation (IM), the undulatory property of light, and the light-matter interaction separately. Following a brief introduction to the measurement principles and typical cases, we systematically analyze the merits and demerits of the three accelerometers, as well as their potential application scenarios. Given the research progress in MOEMS accelerometers, we also present their development tendencies.

Key words: accelerometers, micro-optics, micro-opto-electro-mechanical system, high-precision acceleration measurement

摘要：

微光机电系统（MOEMS）加速度计具有精度高、抗电磁干扰、环境适应性好、可靠性高及易小型化的特点，是未来惯性仪表的重要发展方向。根据光学检测原理对现有微光机电系统加速度计进行了分类：基于直接光强调制、基于光的波动性、基于光与物质相互作用的微光机电系统加速度计；基于测量原理和典型案例，分析了这3类微光机电系统加速度计的优缺点和适用场景；结合微光机电系统加速度计的研究进展，提出了其未来发展的趋势和重点方向。

关键词: 加速度计, 微光学, 微光机电系统, 高精度加速度测量

ZHU Qiju, WANG Xiaoxu, MEI Chunbo, YANG Pengxiang, LU Qianbo. Technology Status and Application Outlook of Micro-Opto-Electro-Mechanical System Accelerometers[J]. Science and Technology Foresight, 2022, 1(4): 81-98.

朱启举, 王小旭, 梅春波, 杨鹏翔, 卢乾波. 微光机电系统加速度计技术现状与应用展望[J]. 前瞻科技, 2022, 1(4): 81-98.

Figures/Tables 32

References 57

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性能指标	MEMS加速度计				MOEMS加速度计
性能指标	电容式	压阻式	压电式	谐振式	MOEMS加速度计
测量原理	板间电容变化	压阻效应	压电效应	改变二阶系统固有频率	加速度→位移→光学读出位移
位移测量精度	亚纳米级	微米至纳米级	亚纳米级	亚纳米级	纳米至飞米级
噪声等效加速度	~10^-6 gHz^-1/2	10^-3~10^-6 gHz^-1/2	10^-6~10^-7 gHz^-1/2	10^-6~10^-7 gHz^-1/2	10^-3~10^-7gHz^-1/2（取决于不同光学原理和机械结构设计）
优点	工艺成熟，易集成，精度适中	结构和读出电路简单	较高的灵敏度和大带宽	灵敏度较高，数字输出，易集成	超高灵敏度潜力，抗电磁干扰，响应快
缺点	电磁干扰，量程较小	灵敏度低，温度系数大	低频特性差，材料不易集成	带宽有限，直流测量困难	较低技术成熟度，异构集成难度大

性能指标	MEMS加速度计				MOEMS加速度计
性能指标	电容式	压阻式	压电式	谐振式	MOEMS加速度计
测量原理	板间电容变化	压阻效应	压电效应	改变二阶系统固有频率	加速度→位移→光学读出位移
位移测量精度	亚纳米级	微米至纳米级	亚纳米级	亚纳米级	纳米至飞米级
噪声等效加速度	~10^-6 gHz^-1/2	10^-3~10^-6 gHz^-1/2	10^-6~10^-7 gHz^-1/2	10^-6~10^-7 gHz^-1/2	10^-3~10^-7gHz^-1/2（取决于不同光学原理和机械结构设计）
优点	工艺成熟，易集成，精度适中	结构和读出电路简单	较高的灵敏度和大带宽	灵敏度较高，数字输出，易集成	超高灵敏度潜力，抗电磁干扰，响应快
缺点	电磁干扰，量程较小	灵敏度低，温度系数大	低频特性差，材料不易集成	带宽有限，直流测量困难	较低技术成熟度，异构集成难度大

性能指标与潜在应用场景	基于直接光强调制	基于光的波动性			基于光与物质相互作用
性能指标与潜在应用场景	基于直接光强调制	干涉腔式	FBG式	光子晶体式	基于光与物质相互作用
光学位移测量精度	微米至纳米级	亚纳米级	纳米级	亚纳米级	高至飞米级
噪声等效加速度	10^-3~10^-9 gHz^-1/2（取决于机械结构设计）	10^-6~10^-9 gHz^-1/2	亚10^-6 gHz^-1/2	亚10^-6 gHz^-1/2	高至亚10^-9 gHz^-1/2
特点	结构简单，成本低廉，灵敏度适中	高集成度，高灵敏度	多点复用，多功能，灵敏度适中	高集成度，高灵敏度	较低技术成熟度，超高灵敏度
潜在应用场景	从日常应用到地球物理应用	惯性导航，地球物理应用	日常应用，装备健康监测	惯性导航	惯性导航，地球物理应用

性能指标与潜在应用场景	基于直接光强调制	基于光的波动性			基于光与物质相互作用
性能指标与潜在应用场景	基于直接光强调制	干涉腔式	FBG式	光子晶体式	基于光与物质相互作用
光学位移测量精度	微米至纳米级	亚纳米级	纳米级	亚纳米级	高至飞米级
噪声等效加速度	10^-3~10^-9 gHz^-1/2（取决于机械结构设计）	10^-6~10^-9 gHz^-1/2	亚10^-6 gHz^-1/2	亚10^-6 gHz^-1/2	高至亚10^-9 gHz^-1/2
特点	结构简单，成本低廉，灵敏度适中	高集成度，高灵敏度	多点复用，多功能，灵敏度适中	高集成度，高灵敏度	较低技术成熟度，超高灵敏度
潜在应用场景	从日常应用到地球物理应用	惯性导航，地球物理应用	日常应用，装备健康监测	惯性导航	惯性导航，地球物理应用