Technology Status and Application Outlook of Micro-Opto-Electro-Mechanical System Accelerometers
ZHU Qiju, WANG Xiaoxu, MEI Chunbo, YANG Pengxiang, LU Qianbo
Science and Technology Foresight . 2022, (4): 81 -98 .  DOI: 10.3981/j.issn.2097-0781.2022.04.006