中国生物微机电系统技术发展现状与展望

doi:10.3981/j.issn.2097-0781.2024.03.002

前瞻科技 ›› 2024, Vol. 3 ›› Issue (3): 19-31.DOI: 10.3981/j.issn.2097-0781.2024.03.002

中国生物微机电系统技术发展现状与展望

张传禹¹(), 蔡新霞², 常凌乾³, 陈健², 李天梁⁴, 刘景全⁵, 高伟卓¹, 胡飞¹, 秦咸明⁶, 吴德志⁷, 徐洪成¹, 张帅龙⁸, 韦学勇¹^,⁷^,^†()

1.西安交通大学仪器科学与技术学院，西安 710049
2.中国科学院空天信息创新研究院，北京 100094
3.北京航空航天大学生物与医学工程学院，北京 100191
4.武汉理工大学机电工程学院，武汉 430070
5.上海交通大学微纳电子学系，上海 200240
6.西安电子科技大学机电工程学院，西安 710071
7.厦门大学机电工程系，厦门 361005
8.北京理工大学集成电路与电子学院，北京 100081

收稿日期:2024-06-30 修回日期:2024-07-12 出版日期:2024-09-20 发布日期:2024-09-18
通讯作者: †
作者简介:张传禹，助理教授。入选中国博士后国际交流计划“西部海外博士后”项目和第9届中国科协青年托举人才工程。中国微米纳米技术学会生物微机电分会秘书，中国自动化学会智能测试技术委员会委员等。Biosensors客座编辑。主要从事微尺度下声流控技术研究，包括微纳尺度声流体现象、流体力学、生物微流控、传热传质强化等。主持和参与国家重点研发计划、国家自然科学基金、欧盟“地平线欧洲”项目等10项。获2022年Microsystems & Nanoengineering国际青年科学家奖。发表论文20篇。电子信箱：chuanyu.zhang@xjtu.edu.cn。
韦学勇，教授，博士研究生导师。西安交通大学仪器科学与技术学院党委书记。国家“万人计划”科技创新领军人才。中国工程院院刊Engineering机械与运载工程学科执行主编、自然出版集团Microsystems & Nanoengineering编委。主要从事微纳传感与测试技术领域研究。主持国家重点研发计划、国家自然科学基金等项目20余项。获国家科技进步奖二等奖、陕西省科技进步奖一等奖、陕西省高等教育教学成果奖一等奖、中国仪器仪表学会科技进步奖一等奖、陕西省机械工程学会科技奖一等奖、2020年获陕西青年科技奖和伯明翰大学FK Bannister奖等奖励和荣誉。发表论文150余篇，授权发明专利70余件。电子信箱：seanwei@mail.xjtu.edu.cn。

Current Development Status and Prospects of BioMEMS Technology in China

ZHANG Chuanyu¹(), CAI Xinxia², CHANG Lingqian³, CHEN Jian², LI Tianliang⁴, LIU Jingquan⁵, GAO Weizhuo¹, HU Fei¹, QIN Xianming⁶, WU Dezhi⁷, XU Hongcheng¹, ZHANG Shuailong⁸, WEI Xueyong¹^,⁷^,^†()

1. School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an 710049, China
2. Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
3. School of Biological Science and Medical Engineering, Beihang University, Beijing 100191, China
4. School of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan 430070, China
5. Department of Micro/Nano Electronics, Shanghai Jiao Tong University, Shanghai 200240, China
6. School of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, China
7. Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, China
8. School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China

Received:2024-06-30 Revised:2024-07-12 Online:2024-09-20 Published:2024-09-18
Contact: †

摘要/Abstract

摘要：

生物微机电系统（Biomedical Microelectromechanical System, BioMEMS）技术是将生物、机械、电子、物理、化学和信息等多学科交叉融合的前沿技术，其研究和应用极大地推动了生物医学领域技术的进步，并具有低成本产业化的潜力，已经成为世界各主要科技强国大力发展的领域。文章系统总结了BioMEMS在生物检测、医学治疗、微纳操纵等领域的前沿进展和国内外发展现状。总体而言，中国在该领域处于世界一流水平，特别是在材料开发、技术应用层面取得了显著成果。但同时也存在一些问题和发展瓶颈，例如，还需要进一步优化我国现有科研资助和人才培养体系来满足BioMEMS技术多学科交叉属性。文章针对性地提出了该领域未来发展趋势和政策建议，以期为中国后续生物微机电系统技术的发展提供参考。

关键词: 生物微机电系统技术, 发展现状, 未来趋势, 政策建议

Abstract:

Biomedical micro-electro-mechanical system (BioMEMS) is a cutting-edge technology that integrates multiple disciplines such as biology, mechanics, electronics, physics, chemistry, and information science, and its research and application have greatly promoted the progress of biomedical technology. BioMEMS has the potential for achieving low-cost industrialization, and it has become a field attracting major technological powers around the world for their further development. This paper systematically summarized the cutting-edge progress and current development status of BioMEMS in China and abroad in fields in terms of biological detection, medical treatment, and micro-nano manipulation. In general, China takes the lead in this field, achieving remarkable accomplishments in material development and technology application. However, there are also some development problems and bottlenecks. For example, the current scientific research funding and student training system needs to be optimized to cater to the interdisciplinary nature of BioMEMS technology. This paper specifically outlines the future development trends and policy recommendations in this field, aiming to provide a reference for the subsequent development of BioMEMS technology in China.

Key words: BioMEMS technology, current development status, future trends, policy recommendations

张传禹, 蔡新霞, 常凌乾, 陈健, 李天梁, 刘景全, 高伟卓, 胡飞, 秦咸明, 吴德志, 徐洪成, 张帅龙, 韦学勇. 中国生物微机电系统技术发展现状与展望[J]. 前瞻科技, 2024, 3(3): 19-31.

ZHANG Chuanyu, CAI Xinxia, CHANG Lingqian, CHEN Jian, LI Tianliang, LIU Jingquan, GAO Weizhuo, HU Fei, QIN Xianming, WU Dezhi, XU Hongcheng, ZHANG Shuailong, WEI Xueyong. Current Development Status and Prospects of BioMEMS Technology in China[J]. Science and Technology Foresight, 2024, 3(3): 19-31.

图/表 8

图1 生物微机电系统技术的多种应用

Fig. 1 Various applications of BioMEMS technology

图2 细胞内物质的传感检测技术

Fig. 2 Sensing and detection technology for intracellular substances

图3 深脑脑机接口技术的多种应用

Fig. 3 Various applications of deep brain-machine interface technology

图4 柔性电子发展现状

Fig. 4 Current development status of flexible electronics

图5 生物微机电领域内微纳感知与手术治疗技术的发展趋势

Fig. 5 Development trend of micro-nano sensing and surgical treatment technology in the field of BioMEMS

图6 多种不同工作原理的声流控器件

Fig. 6 Acoustofluidic devices with different working principles

图7 光流控微机电系统核心技术与功能组成 SPR：Surface Plasmon Resonance，表面等离子体共振。

Fig. 7 Core technology and function components of optofluidic micro-electro-mechanical systems

图8 微流控中的光学操控 BS：Beam Splitter，分束器；SPF：Spatial Filter，空间滤波器；TL：Transfer Lens，传输透镜；CMOS：Complementary Metal-Oxide-Semiconductor，互补金属氧化物半导体。

Fig. 8 Optical manipulation in microfluidics

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中国生物微机电系统技术发展现状与展望

Current Development Status and Prospects of BioMEMS Technology in China

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