前瞻科技 ›› 2022, Vol. 1 ›› Issue (4): 81-98.DOI: 10.3981/j.issn.2097-0781.2022.04.006

• 综述与述评 • 上一篇    下一篇

微光机电系统加速度计技术现状与应用展望

朱启举1(), 王小旭2, 梅春波1, 杨鹏翔1, 卢乾波3   

  1. 1.西安现代控制技术研究所,西安 710065
    2.西北工业大学自动化学院,西安 710072
    3.西北工业大学柔性电子研究院,西安 710072
  • 收稿日期:2022-10-26 修回日期:2022-11-04 出版日期:2022-12-20 发布日期:2023-01-17
  • 作者简介:朱启举,研究员,西安现代控制技术研究所副总工程师,惯导事业部主任。中国兵器科技带头人。主要研究方向为智能化弹药惯性导航及组合导航技术。获国家科学技术进步奖二等奖1项,国防科学技术进步奖二等奖1项。发表论文10余篇,获授权国防专利20余项。电子信箱:zhuqiju971071@sina.com

Technology Status and Application Outlook of Micro-Opto-Electro-Mechanical System Accelerometers

ZHU Qiju1(), WANG Xiaoxu2, MEI Chunbo1, YANG Pengxiang1, LU Qianbo3   

  1. 1. Xi’an Modern Control Technology Research Institute, Xi’an 710065, China
    2. School of Automation, Northwestern Polytechnical University, Xi’an 710072, China
    3. Institute of Flexible Electronics, Northwestern Polytechnical University, Xi’an 710072, China
  • Received:2022-10-26 Revised:2022-11-04 Online:2022-12-20 Published:2023-01-17

摘要:

微光机电系统(MOEMS)加速度计具有精度高、抗电磁干扰、环境适应性好、可靠性高及易小型化的特点,是未来惯性仪表的重要发展方向。根据光学检测原理对现有微光机电系统加速度计进行了分类:基于直接光强调制、基于光的波动性、基于光与物质相互作用的微光机电系统加速度计;基于测量原理和典型案例,分析了这3类微光机电系统加速度计的优缺点和适用场景;结合微光机电系统加速度计的研究进展,提出了其未来发展的趋势和重点方向。

关键词: 加速度计, 微光学, 微光机电系统, 高精度加速度测量

Abstract:

A micro-opto-electro-mechanical system (MOEMS) accelerometer features high precision, electromagnetic interference resistance, good adaptability to the environment, high reliability, and easy miniaturization, which is the major development trend of inertial instruments. According to the optical measurement principle, this paper divides MOEMS accelerometers into three categories, which are based on the direct intensity modulation (IM), the undulatory property of light, and the light-matter interaction separately. Following a brief introduction to the measurement principles and typical cases, we systematically analyze the merits and demerits of the three accelerometers, as well as their potential application scenarios. Given the research progress in MOEMS accelerometers, we also present their development tendencies.

Key words: accelerometers, micro-optics, micro-opto-electro-mechanical system, high-precision acceleration measurement