微纳制造技术的发展趋势与发展建议

doi:10.3981/j.issn.2097-0781.2024.03.001

前瞻科技 ›› 2024, Vol. 3 ›› Issue (3): 7-18.DOI: 10.3981/j.issn.2097-0781.2024.03.001

微纳制造技术的发展趋势与发展建议

林启敬¹^,²(), 张福政¹^,²^,^†(), 赵立波¹^,²

1.精密微纳制造技术全国重点实验室，西安 710054
2.西安交通大学仪器科学与技术学院，西安 710049

收稿日期:2024-07-10 修回日期:2024-07-18 出版日期:2024-09-20 发布日期:2024-09-18
通讯作者: †
作者简介:林启敬，教授，博士研究生导师。西安交通大学仪器科学与技术学院院长助理，西安交通大学智能传感与系统研究所所长。中国微米纳米技术学会微纳米制造及装备分会理事兼副秘书长。国家级青年人才计划入选者。主要从事微纳制造技术、光纤传感技术和柔性微纳器件方面的研究，在耐高温光纤温度传感器、耐高温光纤集成传感器、机器人柔性触觉传感器等方面取得了创新性成果。主持国家重点研发计划、国家自然科学基金等项目20余项。获第十四届陕西青年科技奖、2022年中国仪器仪表学会青年科技人才奖、中国仪器仪表学会科技进步奖一等奖、陕西省科学技术奖一等奖等省部级和国家行业学会科技奖励8项，教学成果奖励2项。出版论著1部，发表论文130余篇，授权发明专利38件，授权软件著作权5项。电子信箱：qjlin2015@xjtu.edu.cn。
张福政，助理教授，硕士研究生导师。入选中国博士后创新人才支持计划、西安交通大学青年优秀人才支持计划。中国微米纳米技术学会高级会员，毛明院士工作站特聘青年科学家。主要从事微纳制造技术和柔性微纳器件方面的研究，在柔性气体传感器、机器人柔性触觉传感器、柔性材质识别传感器等方面取得了创新性成果。主持博士后创新人才支持计划、航空科学基金项目等项目5项。发表论文19篇，授权发明专利8件，授权软件著作权3项。电子信箱：fzzhang@xjtu.edu.cn。
基金资助:
国家重点研发计划(2021YFB3201800)

Development Trends and Development Suggestions for Micro-nano Manufacturing Technology

LIN Qijing¹^,²(), ZHANG Fuzheng¹^,²^,^†(), ZHAO Libo¹^,²

1. State Key Laboratory for Manufacturing System Engineering, Xi’an 710054, China
2. School of Instrument Science and Technology, Xi’an Jiaotong University, Xi’an 710049, China

Received:2024-07-10 Revised:2024-07-18 Online:2024-09-20 Published:2024-09-18
Contact: †

摘要/Abstract

摘要：

微纳制造技术能够实现微纳米级别的高精密加工，是现代高科技制造领域的核心技术。提升微纳制造技术水平，有助于提高中国高端制造业的整体竞争力，对推动科技创新和促进产业升级具有积极意义。文章概述了微纳制造技术体系，着重分析了芯片微纳制造、激光微纳制造和聚合物微纳制造等典型微纳制造技术的发展态势，概述了多尺度精密微纳加工、多功能材料合成制造、高度集成和多功能化、自组装技术与结构、生物纳米技术融合制造、量子信息与纳米器件及绿色环保制造技术等发展趋势，针对性提出了深化基础研究、创新材料与工艺、强化人才培育与引进、加强产学研结合与技术转化等发展建议，以期促进我国中国微纳制造技术产业整体水平提升和高质量发展。

关键词: 微纳制造, 精密加工, 光刻技术, 微/纳机电系统, 纳米材料

Abstract:

Micro-nano manufacturing technology can achieve high-precision processing at the micro-nano level and is the core technology in the field of modern high-tech manufacturing. Improving the level of micro-nano manufacturing technology will help enhance the overall competitiveness of high-end manufacturing in China and have a positive significance for promoting technological innovation and industrial upgrading. In this paper, the micro-nano manufacturing technology system was introduced, and the development of several typical micro-nano manufacturing technologies such as chip micro-nano manufacturing, laser micro-nano manufacturing, and polymer micro-nano manufacturing was analyzed in detail. In addition, the development trends of multi-scale precision micro-nano processing technology, multifunctional material synthesis and manufacturing, high integration and multifunctionality, self-assembly technology and structure, bio-nanotechnology fusion manufacturing, quantum information and nanodevices, and green and environmentally friendly manufacturing technology were summarized. Targeted development suggestions were put forward, including deepening basic research, innovating materials and processes, strengthening talent training and introduction, and enhancing the integration of industry, academia, and research and technology transformation, so as to promote the overall level and high-quality development of the micro-nano manufacturing in China.

Key words: micro-nano manufacturing, precision machining, lithography technology, micro/nano electromechanical system, nanomaterials

林启敬, 张福政, 赵立波. 微纳制造技术的发展趋势与发展建议[J]. 前瞻科技, 2024, 3(3): 7-18.

LIN Qijing, ZHANG Fuzheng, ZHAO Libo. Development Trends and Development Suggestions for Micro-nano Manufacturing Technology[J]. Science and Technology Foresight, 2024, 3(3): 7-18.

图/表 2

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微纳制造技术的发展趋势与发展建议

Development Trends and Development Suggestions for Micro-nano Manufacturing Technology

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