集成电路核心工艺装备技术的现状与展望
赵晋荣, 韦刚, 侯珏, 曹永友, 董金卫, 卢夕生, 孙伟
Current Situation and Development Trend of Core Process Equipment Technologies for Integrated Circuit
ZHAO Jinrong, WEI Gang, HOU Jue, CAO Yongyou, DONG Jinwei, LU Xisheng, SUN Wei
前瞻科技
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2022, (3): 61
-72
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DOI: 10.3981/j.issn.2097-0781.2022.03.005
