后摩尔时代先进集成电路技术展望

后摩尔时代先进集成电路技术展望

董俊辰, 张兴

Prospects of Advanced Integrated Circuit Technologies in Post-Moore Era

DONG Junchen, ZHANG Xing

前瞻科技 . 2022, (3): 42 -51 . DOI: 10.3981/j.issn.2097-0781.2022.03.003